Advances in Chemical Mechanical Planarization (CMP) by Suryadevara Babu PDF

By Suryadevara Babu

Advances in Chemical Mechanical Planarization (CMP) provides the newest details on a mainstream method that's serious for high-volume, high-yield semiconductor production, or even extra in order equipment dimensions proceed to reduce. The expertise has grown to surround the elimination and planarization of a number of steel and dielectric fabrics and layers either on the equipment and the metallization degrees, utilizing diverse instruments and parameters, requiring advancements within the keep an eye on of topography and defects.

This vital booklet deals a scientific assessment of basics and advances within the sector. half One covers CMP of dielectric and steel motion pictures, with chapters concentrating on using specific options and techniques, and on CMP of specific a variety of fabrics, together with extremely low-k fabrics and high-mobility channel fabrics, and finishing with a bankruptcy reviewing the environmental affects of CMP techniques.

Part addresses consumables and method regulate for more suitable CMP, and comprises chapters at the training and characterization of slurry, diamond disc pad conditioning, using FTIR spectroscopy for characterization of floor tactics, and ways for defection characterization, mitigation, and reduction.

  • Considers suggestions and procedures for CMP of dielectric and steel films
  • Includes chapters dedicated to CMP for specific materials
  • Addresses consumables and approach regulate for more desirable CMP

Show description

Read Online or Download Advances in Chemical Mechanical Planarization (CMP) (Woodhead Publishing Series in Electronic and Optical Materials) PDF

Best electronics books

New PDF release: Practical Signal and Image Processing in Clinical Cardiology

Sleek sign and photo acquisition platforms utilized in the sector of cardiology collect, examine, and shop facts digitally. floor electrocardiography, intra-cardiac electrogram recording, echocardiograms, x-ray, magnetic resonance imaging, and computed tomography are one of the modalities within the cardiology box the place sign processing is utilized.

Read e-book online Advanced Applications of Natural Language Processing for PDF

This publication explains how might be created details extraction (IE) purposes which are capable of faucet the substantial volume of suitable details to be had in normal language assets: net pages, respectable files similar to legislation and rules, books and newspapers, and social internet. Readers are brought to the matter of IE and its present demanding situations and obstacles, supported with examples.

Read e-book online Gizmos or: The Electronic Imperative: How Digital Devices PDF

Gizmos or: The digital primary bargains a concise sequence of analyses at the transformative influence of electronic units on American society. With methods starting from semiotic concept to psychoanalytic concept, sociological concept to non-public mirrored image, Berger faucets the span of data from his prolific profession to aid readers higher comprehend the function electronic units play either of their technologic, monetary, and common-use kinds.

Additional resources for Advances in Chemical Mechanical Planarization (CMP) (Woodhead Publishing Series in Electronic and Optical Materials)

Example text

Download PDF sample

Advances in Chemical Mechanical Planarization (CMP) (Woodhead Publishing Series in Electronic and Optical Materials) by Suryadevara Babu

by Ronald

Rated 4.94 of 5 – based on 9 votes