Download PDF by Kubby: A Guide to Hands-on MEMS Design and Prototyping

By Kubby

even if you're a scholar taking an introductory MEMS path or a practicing engineer who must wake up to hurry quick on MEMS layout, this sensible consultant presents the hands-on adventure had to layout, fabricate and try MEMS units. you'll use foundry multi-project fabrication tactics for inexpensive MEMS initiatives, in addition to computer-aided layout instruments (layout, modeling) that may be used for the layout of MEMS units. quite a few layout examples are defined and analysed, from fields together with micro-mechanics, electrostatics, optical MEMS, thermal MEMS and fluidic MEMS. there is additionally a last bankruptcy on packaging and trying out MEMS units, in addition to routines and layout demanding situations on the finish of each bankruptcy. suggestions to the layout problem difficulties are supplied online.

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A Guide to Hands-on MEMS Design and Prototyping by Kubby

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